Earticle

현재 위치 Home

Simulations of Effects of Variable Conductance Throttle Valve on the Characteristics of High Vacuum System

첫 페이지 보기
  • 발행기관
    국제인공지능학회(구 한국인터넷방송통신학회) 바로가기
  • 간행물
    International Journal of Internet, Broadcasting and Communication KCI 등재후보 바로가기
  • 통권
    Vol.7 No.2 (2015.08)바로가기
  • 페이지
    pp.28-35
  • 저자
    Hyung-Taek Kim, Han-Ho Cho
  • 언어
    영어(ENG)
  • URL
    https://www.earticle.net/Article/A258539

※ 원문제공기관과의 협약기간이 종료되어 열람이 제한될 수 있습니다.

원문정보

초록

영어
Thin film electronic devices which brought the current mobile environment could be fabricated only under the high quality vacuum conditions provided by high vacuum systems. Especially for the development of advanced thin film devices, constant high quality vacuum as the deposition pressure is definitely needed. For this purpose, the variable conductance throttle valves were employed to the high vacuum system. In this study, the effects of throttle valve applications on vacuum characteristics were simulated to obtain the optimum design modelling of variable conductance of high vacuum system. Commercial simulator of vacuum system, VacSim(multi), was used on this investigation. Reliability of employed simulator was verified by the simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results were plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

목차

Abstract
 1. Introduction
 2. Simulations
  2.1. Simulation of diffusion pump system
  2.2. Simulation of throttle valve system
 3. Results and Conclusion
 Acknowledgment
 5. References

키워드

Vacuum system Throttle valve Variable conductance Vacuum simulation

저자

  • Hyung-Taek Kim [ Department of Advanced Materials Engineering, College of Engineering, Incheon National University, Incheon, Korea ] Corresponding Author
  • Han-Ho Cho [ Department of Advanced Materials Engineering, College of Engineering, Incheon National University, Incheon, Korea ]

참고문헌

자료제공 : 네이버학술정보

간행물 정보

발행기관

  • 발행기관명
    국제인공지능학회(구 한국인터넷방송통신학회) [The International Association for Artificial Intelligence]
  • 설립연도
    2000
  • 분야
    공학>전자/정보통신공학
  • 소개
    인터넷방송, 인터넷 TV , 방송 통신 네트워크 및 관련 분야에 대한 국내는 물론 국제적인 학술, 기술의 진흥발전에 공헌하고 지식 정보화 사회에 기여하고자 한다.

간행물

  • 간행물명
    International Journal of Internet, Broadcasting and Communication
  • 간기
    계간
  • pISSN
    2288-4920
  • eISSN
    2288-4939
  • 수록기간
    2009~2025
  • 십진분류
    KDC 326 DDC 380

이 권호 내 다른 논문 / International Journal of Internet, Broadcasting and Communication Vol.7 No.2

    피인용수 : 0건 (자료제공 : 네이버학술정보)

    함께 이용한 논문 이 논문을 다운로드한 분들이 이용한 다른 논문입니다.

      출처 : 네이버학술정보

        0개의 논문이 장바구니에 담겼습니다.

        페이지 저장
        소속기관 조회
        이용자님의 소속기관(단체)이 서비스에 가입되어 있는지 확인해 보십시오.
        기관회원에 소속되어 있는 이용자는 원문을 무료로 이용할 수 있습니다.