Earticle

본 논문에서는 ECT Array Probe를 이용한 원자력 발전소의 SG세관의 결함 신호를 해석하였다. 프로브의 전자기적 특성을 해석하기 위하여 맥스웰 방정식을 이용하여 지배방정식을 유도하였고, 3차원 유한요소법을 이용하여 전자기 수치 해석을 수행하였다. 신호해석을 위해 사용된 결함의 종류는 FBH결함이며, 결함의 깊이는 세관 두께의 40[%] 및 100[%]로 하였다. 시험주파수는 300[kHz], 400[kHz]를 사용하였으며, 각각의 시험주파수에 대한 결과를 비교 분석하였다. 해석결과 결함부위에서 신호의 증가를 확인할 수 있었으며, 주파수 시험변화시 300[kHz]보다 400[kHz]일때 결함 신호가 증가하는 것을 확인할 수 있었다. 또한 획득한 신호를 ASME 표준 시험편을 이용한 ECT Array Probe의 와전류탐상 실험신호와 비교하였다. 본 논문의 결과는 ECT Array Probe를 이용하여 원전 SG세관 검사시 결함신호해석에 도움이 될 것으로 사료된다.

We have studied the vortex dynamics in YBa$_2Cu_3O_7$ single crystals with columnar defects using micro Hall-probe array. The Hall-probe array technique allowed a simultaneous measurement of the time and spatial dependence of the vortex density so that more detailed information on flux dynamics could be obtained. We found that field profiles inside sample were similar to the Bean's critical state model from the magnetic hysteresis measurement. Normalized relaxation rates were maximum near the center and decreased toward the edge if applied field H$_{app}$ is greater than the penetration field H. But applied magnetic field H$_{app}$ is less than H, relaxation rates were minimum near the center and increased toward edge. We found that glassy exponent ${\mu}$ has the value of ${\sim}$ 1 whose corresponding vortex motion is half-loop excitation. However, single vortex creep, ${\mu}$ ${\sim}$ 1/7, was also found at 30 K and H$_{app}$ ${\cong}$ H'. Calculation of activation energy, U, was possible from direct analysis of the local relaxation data using the basic diffusion equation. From these results, we found that U increases logarithmically with time and U around center was lower than that at the edge.

Memory 반도체 Test공정에서 사용되는 Probe Card의 Probing Area가 넓어지면서 종래에 사용되던 Cantilever제품의 사용이 불가능하게 되고, MEMS공정을 사용한 새로운 형태의 Advanced제품이 시장에 출현을 하였다. MEMS형의 제품은 다수의 Micro Spring을 MLC(Multi Layer Ceramic)위에 MEMS 공정을 사용하여 생성하는 방식으로서 MLC는 좁은 지역에 다수의 Pin을 생성 할 수 있는 공간을 만들어 주며, 또 다른 이유는 전기적 특성인 임피던스를 맞추고 다수의 Pin의 압력에 의하여 생기는 하중을 Ceramic기판으로 지탱하기 위한 목적도 있다. 이에 MLC와 같은 전기적 특성을 임피던스를 맞춘 RF-CPCB를 사용하여 작은 면적에 다수의 Pin접합이 가능한 방법을 마련한 후, 이 RF-PCB를 부착하여 Pin의 하중을 받는 Wafer와 유사한 열팽창을 갖는 Substrate를 사용하여 MLC를 대체하여 다양한 온도 조건에서 사용이 가능하며, 복잡하고 공정비가 많이 드는 MEMS 공정에 의한 일괄 Micro Spring 생성 공정을 전주 도금 또는 2D방식의 도금 Pin으로 대체하였으며, Probe Card의 중요한 물리적 특성인 Pin들의 정렬도를 마련하기 위해 Photo Process를 사용한 Wafer로 만든 Wafer Pin Array Frame을 사용하여 2D 제작 Pin을 일괄 또는 부분 접합이 가능한 방법으로 Probe Array Head를 제작하여 이들을 부착하여 Probe Array Head를 이전의 MEMS공정 방법에 비해 쉽고 빠르게 만들어 probe Card를 제작 할 수 있게 되었다.

In this paper, the eddy current signals come from a pair oi transmit-receive (T/R) pancake coil on ECT array Probe are analyzed with the variations of the lift-of and of the distance between transmit and receive coils. To obtain the electromagnetic characteristics of the probes, the governing equation describing the eddy current problems is derived from Maxwell's equation and is solved using three-dimensional finite element method. Eddy current signals from T/R coils on ECT array probe have quite different characteristics compared with ones from impedance coil on rotating pancake coil probe. The results in this paper ran be helpful when the field eddy current signals from ECT array probe are evaluated.

A lot of information storage devices have been introduced and developed for recently years. The trends of those devices are high capacity, compact size, low power consumption, reliability, and removability for data interchange with other device. As a satisfaction of these trends, near-field technique is in the spotlight as the next generation device. In order for a near-field recording to be successfully implemented in the storage device, a slider and suspension is introduced as actuating mechanism. The optical slider is designed considering near-filed optics. Suspension is not only supports slider performance, and tracking servo capacity but also meets the optical characteristics such as tilt aberration, and guarantee to satisfy shock performances for the mobility fir the actuator. In this study, the optical slider and the suspension for near-field probe array are designed and analyzed considering dynamic performance of head-gimbal assembly and shock simulation..

A real-time monitoring of immersed antenna type inductively coupled plasma (ICP) was done with a homemade 2 dimensional voltage probe array to check the uniformity of the plasma. Measured voltage values with a high impedance voltmeter are close to the floating potential of the plasma. As the substrate carrier was moving into a magnetron sputtering plasma diffusive from a $125mm{\times}625mm$ size cathode, measured results showed reliably separation of plasma into the upper and lower empty space over the carrier. Infra red thermal imaging camera was used to observe the cross corner effect in situ without eroding a target to the end of the usage. 3 dimensional particle trace model was used to analyze the magnetron discharge's behavior.

In the information storage development, the trend of the storage device is to increase the recording density. Among such an effort, near-field probe recording is spotlighted as a method of high increasing recording density. For the successfully embodiment of storage device, the actuating mechanism of near-field probe is essentially designed. In this paper, we suggest the slider similar with conventional HDD and design the slider using near-field probe for the purpose of applying the slider in order to control gap between probe and media. The most important object of slider design is to guarantee the flying ability and stability. For achievement of these design objects, we perform two step of optimal design process. The media is supposed to model as random displacement, which is only considered roughness of disk surface. The design slider is analyzed with dynamic state in assumed media. At this process, the optimal model is confirmed to stable flying stability.

In the information storage development, the trend of the storage device is to increase the recording density. Among such an effort, near-field probe recording is spotlighted as a method of high increasing recording density. For the successfully embodiment of storage device, the actuating mechanism of near-field probe is essentially designed. In this paper, we suggest the slider similar with conventional HDDs and design the slider using near- field probe for the purpose of applying the slider in order to control gap between probe and media. The most important object of slider design is to guarantee the flying ability and stability. For achievement of these design objects, we perform two step of optimal design process. The media is mod! eled as random displacement, which is only considered roughness of disk surface. The design slider is analyzed with dynamic state in assumed media. At this process, the optimal model is confirmed to stable flying stability.

This paper reports the characteristics of a bidirectional antenna by using a planar array of a probe excited circular ring. The element of a bidirectional antenna is first designed to achieve the maximum directivity. The directivity can be further increased by arranging these elements to form the linear array. There are two types of linear array to be investigated i.e., on axis and off axis arrangement. On-axis linear array yields better directivity than off-axis linear array. Therefore, this orientation is further used to form the planar array. The radiation characteristics of this optimum planar array are rigorously reported. The proposed structure is very useful to extend the distance between the base station in PCT system.

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

본 논문은 원전 증기발생기(SG, steam generator) 세관의 정밀 진단을 위한 차세대 탐촉자인 배열형 와전류 탐촉자의 특성 해석에 대한 3차원 전자기 수치해석을 수행하였다. 다양한 결함 해석을 위해 ASME(American Society of Mechanical Engineers) 표준시험편과 X-probe combo 표준보정시험편(inline EXP/spiral groove combo standard)을 선정하여 탐상신호를 획득하고, 실제 실험 신호와 비교하여 결과의 타당성을 검증하였다. 표준 보정 시험편의 해석 결과를 바탕으로 원전 SG 세관에서 주로 발생하고 있는 pitting, SCC(stress corrosion cracking), multiple SCC, wear 결함에 대하여 탐상신호를 획득하였다. 해석 대상으로는 원자력발전소 SG 세관으로 사용하고 있는 Inconel 600 도체관을 사용하였고, 이때의 시험주파수는 300 kHz이다. 본 논문을 통하여 각각의 결함에 대한 신호 특성을 파악하여 배열형 와전류 탐촉자의 결함의 종류에 따른 신호 특성을 확인할 수 있었다. 본 논문의 결과는 배열형 와전류 탐촉자의 와전류 탐상 신호 평가시 도움이 될 것이다.

In this paper, 3-dimensional electromagnetic numerical analysis is performed about the eddy current(EC) array probe characteristic which is the next generation probe for accurate diagnosis of steam generator(SG) in nuclear power plants(NPPs). ASME(American Society of Mechanical Engineers) Standard and X-probe combo calibration standard tube are selected for acquisition of eddy current testing(ECT) signals and this result of compared with the real test signals for reasonability of result. Based on the analysis result of calibration standard tube, ECT signals that are about the defects of pitting, stress corrosion cracking(SCC), multiple SCC and wear is obtained. Material of specimen was Inconel 600 which is usually used for SG tubes in NPPs. The operation frequency of 300 kHz were used. The signal characteristics could be observed according to the various defects. The results in this paper can be helpful when the ECT signals from EC array probe are evaluated and analyzed.

본 논문에서는 전자기 유한요소 해석을 통하여 원전 증기발생기(SG, steam generator) 세관의 결함 크기 변화에 따른 배열 와전류 프로브의 와전류탐상 특성을 해석하였다. 프로브의 전자기적 특성을 해석하기 위하여 맥스웰 방정식을 이용하여 지배방정식을 유도하였고, 이를 3차원 전자기 유한요소법을 이용하여 문제를 해석하였다. 해석을 위해 선정한 결함은 평저공(FBH, flat bottomed hole) 결함을 선정하였다. FBH결함에 대해 결함의 위치를 관의 외부표면에 존재하게 하고 결함의 깊이는 세관 두께의 20%, 40%, 60%, 80%, 100%로 하였다. 또한 결함의 크기변화 및 시험주파수를 100 kHz, 300 kHz, 400 kHz로 변화시켜 해석하였다. 해석 대상으로는 원자력발전소 증기발생기 세관으로 사용되고 있는 Inconel 600 도체관을 사용하였다. 본 논문을 통하여 결함형상, 깊이 및 크기, 시험주파수의 변화에 따른 탐상신호의 변화를 확인할 수 있었다. 본 논문의 결과는 배열 와전류 프로브의 와전류탐상 신호 평가시 도움이 될 것이다.

In this paper, the signal analysis of eddy current array probe was performed to analyze the electromagnetic characteristics with the variation of FBH(flat bottomed hole) defects size on steam generator tube in NPP(nuclear power plants) using the electromagnetic finite element method. To obtain the electromagnetic characteristic of probes, the governing equation was derived from Maxwell's equations, and the individual problem was analyzed by using the 3-dimensional finite element method. For the simulation FBH defects were used. The depth of FBH defects were 20%, 40%, 60%, 80% and 100% of steam generator(SG) tube thickness, and it was assumed that the defects were located on the tube outside. And the operation frequencies of 100 kHz, 300 kHz and 400 kHz were used. Material of specimen was Inconel 600 which is usually used for SG tubes in NPP. The signal difference could be observed according to the size variation of depth of FBH defects and operation frequencies. The results in this paper can be helpful when the ECT(eddy current testing) signals from EC array probe are evaluated and analyzed.

본 논문에서는 원자력 발전소의 SG세관 검사를 위한 배열와전류프로브의 와전류탐상 특성을 해석하였다. 신호해석을 위해 원자력발전소 SG 세관의 내부 및 외부결함을 모델링하였으며, 결함의 깊이는 세관 두께의 40[%]로 하였다. 해석방법은 3차원 유한요소법을 이용하여 전자기 수치 해석을 수행하였다. 두 종류 결함의 수치해석 비교 결과 내부결함의 신호가 외부결함 신호에 비해 크게 발생되는 것을 확인할 수 있었으며, 또한 획득한 신호를 ASME 표준 시험편을 이용한 배열와전류 프로브의 와전류탐상 실험신호와 비교하였다. 본 논문의 결과는 원전설비검사를 위한 배열와전류프로브 신호의 특성해석에 도움이 될 것으로 사료된다.

본 논문에서는 전자기 유한요소 해석을 이용하여 원전 증기발생기 세관에서의 결함 변화에 따른 배열와전류프로브의 와전류탐상 특성을 해석하였다. 프로브의 전자기적 특성을 해석하기 위하여 3차원 전자기유한요소법을 이용하였다. 해석 대상으로 FBH 결함이 있는 세관을 사용하였으며, 결함의 위치는 관의 외부표면에 존재하게 하고 결함의 깊이는 세관 두께의 20%, 40%, 60%, 80%, 100%로 하였다. 결함의 크기를 변화시켰으며, 시험주파수는 100kHz, 300kHz, 400kHz를 사용하였다. 배열와전류프로브의 방향성에 대한 특성을 확인하기 위하여 축방향 및 원주방향 Notch 결함 신호의 차이를 비교하였다. 본 논문을 통하여 결함형상, 깊이 및 크기, 시험주파수의 변화에 따른 탐상신호의 변화를 확인할 수 있었으며, 본 논문의 결과는 배열와전류프로브의 와전류탐상 신호 평가 시 도움이 될 것이다.

A optical head unit for nano optical probe away was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension fer near-field probe array are designed and analyzed.