Earticle

이 연구는 대부분의 병원에 있어 구성원 수가 가장 많을 뿐 아니라 서비스 제공 과정에 고객과의 직접적인 접점이 가장 빈번한 간호사의 전문직업성이 직무만족과 고객지향성 및 서비스 제공 수준 간에 미치는 영향과 구조적 관계를 분석하여 구성원으로 하여금 양질의 서비스를 제공하는데 필요한 전략적 방안을 도출할 목적으로 수행되었다. 연구를 위해 구조화된 설문지를 이용하여 서울지역의 6개 전문병원의 간호사 142명으로부터 자료를 수집하여 크론바흐 $\alpha$와 SPSS 2.0K를 이용한 요인분석을 시행하였다. 연구 결과, 전문직업성은 고객지향성과 직무만족에 정(+)의 영향을 미쳤으나 서비스 제공 수준에는 정(+)의 영향을 미치지 않았으며, 고객지향성은 서비스 제공 수준에 정(+)의 영향을 미친 반면에 직무만족은 서비스 제공 수준에 정(+)의 영향을 주지 않는 것으로 분석되었다. 따라서 간호학과의 교과과정에 고객만족과 서비스의 중요성을 강조하는 과목이 포함되어야 하며, 전문병원도 재직 중인 간호사를 대상으로 고객관리의 중요성을 지속적으로 교육하는 것이 필요할 것이다.

The main purpose of this study is to examine a influence factor of professionalism which is effected on nurse's customer orientation, job satisfaction and service delivery level in specialty hospitals. And this study has reviewed the theoretical background of specialty hospital system, professionalism, customer orientation, job satisfaction and service delivery level, and set up the hypothesis to test the relations with nurse's professionalism, customer orientation, job satisfaction and service delivery level. Data were collected from 142 nurses in 6 specialty hospitals in the Seoul region using a standardized questionnaire. For reliability and appropriateness, Cronbach $\alpha$ and factor analysis and SPSS 12.0K for the actual proof were used. The research findings are summarized below. The professionalism influences positively on the customer orientation and the job satisfaction while it does not on the service delivery level. Also, the customer orientation influences positively on the service delivery level, it does not influence positively on the service delivery level as the research is analyzed. Therefore, the courses that are emphasizing the customer satisfaction and the importance of service should be included in the curriculum of the Department of Nursing Science and the nurses in active service at speciality hospitals should be trained persistently for the importance of customer management.

우리나라의 지하수관리는 연간 지하수 함양량을 기반으로 수행되어 왔으나 지히수 함양량과 지표수-지하수 상호작용은 시공간적으로 변동하는 양이므로 지속적인 모니터링과 동적인 분석을 통해 지하수자원의 지속가능성이 평가되어야 할 것이다. 본 연구에서는 무심천 유역을 대상으로 지표수-지하수 통합해석 모형인 SWAT-MODFLOW를 이용하여 다양한 지하수 양수 시나리오(무양수 및 현 이용량의 1~3배)에 대한 수문성분 해석을 수행하였다. 현 이용량으로 양수하는 경우가 비교적 지속가능한 개발량으로 판단되었는데 이때 연간 기저유출량은 16%, 대수층 저류량은 27 mm 감소하는 것으로 나타났다. 지하수의 지속가능성을 평가하기 위해서는 지하수 이용에 따른 수문학적, 생태학적, 사회 경제적, 기술적 영향을 평가하는 총체적 접근법이 도입되어야 하며 이를 위해서는 물리적인 분석과 함께 지역사회의 합의 또한 중요한 의사결정 방식이라고 판단되었다.

In Korea, groundwater management has been conducted based on the estimation of annual average of groundwater recharge. Since groundwater recharge and surface water-groundwater interactions show spatiotemporal variation, continuous monitoring and dynamic analysis must be carried out to evaluate the sustainability of groundwater resources. In this study, SWAT-MODFLOW, an integrated surface water-groundwater model was used to analyze surface-groundwater interactions for various groundwater pumping scenarios in Musimcheon watershed. When current usage is applied, the baseflow reduction is about 16%, and annual averaged storage reduction is about 27 mm for whole watershed. As a holistic approach to groundwater sustainability considers the hydrological, ecological, socioeconomic, technological aspects of groundwater utilization, the exploitable groundwater should be determined by physical analysis as well as social compromise in a community.

Objectives : The purpose of this study was 1) to investigate the possibility of taking blood stasis pattern as a clinical parameter of frozen shoulder, using blood stasis pattern questionnaire (BSPQ) to frozen shoulder group comparing with normal group, and 2) to find out the relationship of the severity of main frozen shoulder symptoms (pain and limited range of motion of shoulder) and the level of blood stasis pattern through BSPQ analysis. Methods : During the period of January 2010 to July 2010, fifty five frozen shoulder patients who visited outpatient clinic of department of acupuncture and moxibustion in East-West Neo Medical Center, Kyung Hee University and fifty five normal people without shoulder pain nor limited ROM in shoulder joint were evaluated through BSPQ, and to the frozen shoulder group, also evaluated three different visual analogue scales (VAS) of pain (pain on average, pain at night, and pain on motion) and active / passive range of motion (ROM) of shoulder joint. Results : Mean blood stasis pattern score of frozen shoulder patients group was significantly higher than the score of normal group (patients vs normal group : $4.85{\pm}1.68$ vs $3.49{\pm}1.54$). Three different types of pain VAS (on average, at night and on motion) showed low to very low positive correlation with BSPQ scores when analyzed with Pearson's correlation coefficient. ROM levels in shoulder joint were not significantly related to BSPQ scores, though active external rotation range showed low positive correlation with BSPQ scores. Conclusions : Patients with frozen shoulder showed higher blood stasis pattern score in BSPQ but the level of blood stasis pattern is not significantly related to the severity of pain or limitation of ROM in shoulder joint.

Steel clapping plate is used to connecting rubber body in rubber dam. However, once the steel clapping plate corrodes, it may cause faults, such as the same problems experienced by typical reinforcing steel. This study evaluated the applicability of glass fiber reinforced polymer composite(GFRP) clapping plate as a substitute for steel clapping plate. Absorption and load test were conducted to evaluate the decrease in durability of GFRP clapping plate exposed to deterioration environments. In the durability test results, the absorption rate of GFRP clapping plate was appeared as 0.6~1.0% in 50 day of immersion time. Also, the fracture load decreased with accelerated degradation environment exposure. Moreover, the absorption rate in GFRP clapping plate increased as degradation progressed, reducing the fracture load.

도시에는 다양한 종류의 기반시설들이 있고 이들은 계획방법에 따라 건축적으로 활용될 수 있는 가능성도 충분히 가지고 있다. 기반시설의 건축적 활용은 가용지가 부족한 도시에서 유휴공간으로 방치될 수 있는 도시 내 잃어버린 공간을 재생시킨다는 의미도 가지며 공공시설의 통합디자인이라는 측면에서도 중요하다. 본 연구는 이 점에 주목하여 도시 내 기반시설 중 교통관련 시설인 교량, 도로, 교통섬 등을 활용하여 공공공간을 계획한 사례들을 중심으로 계획특성을 고찰하고 시사점을 도출하였다.

Acute mediastinitis is a fatal infection which occurs related to connective tissue of mediastium, in the thoratic organs. Occurrence of mediastinitis due to craniocervical infection is very rare, and is defined as descending necrotizing mediastinitis. November 8th, 2008, man in his early fifties visited ER due to severe swelling on left neck area and dyspnea. Antibiotic were administered immediately, and vast amount of abscess formation on pneumomediastinum and adjacent tissues were observed via chest computed tomography. With cooperation of thoracic and cardiovascular surgery department, emergency incision and drainage with drain insertion was done to remove abscess, and control the infection. After surgery, everyday saline irrigation through drain was done during hospitalization, with continues antibiotic therapy. Descending necrotising mediastinitis is a most rare and dangerous infection which occurs on oropharyngeal area. In case of descending necrotising mediastinitis, accurate diagnosis, airway maintenance, remove of abscess by incision and drainage, aggressive antibiotic therapy and continuous saline irrigation is necessary to increase patient survivability. Also, computed tomography with contrast media is essential to figure out the size and location of the infection and abscess formation.

Performances of power generation engine were investigated with syngas from RPF. A stoker type, multi-staged pyrolysis-gasification system, was employed for syngas generation and the syngas was refined with the sequential cleaning processes composed of a gas cooler, a bag filter and a wet scrubber. 20 kWe commercial syngas power generation engine was adopted to burn the cleaned syngas which is mainly composed of hydrogen, carbon monoxide, carbon dioxide and methane. The performance of the engine was tested with various syngas compositions and the results were compared to LNG case. Electric power output, exhaust gas temperature, and emission characteristics were measured, and the efficiency of engine generation was investigated as a function of load of power generation.

Objectives : The authors aimed to determine the presence of relationships between cervical pain and cervical curvature, lumbar curvature, sacral slope and sagittal spinal balance. Methods : Medical records of outpatients who made their first visits to the Department of Acupuncture and Moxibustion in the Spine center at Kyung Hee East-West Neo Medical Center between September 1, 2008 and October 31, 2009 were evaluated. A total of 50 patients visiting within the time period had visited with a chief complaint of cervical pain, and had lateral entire spine X-rays taken. After excluding patients with previous spine operations, 46 patients were selected for the final analysis. The cervical lordotic angle(CLA), lumbar lordotic angle(LLA), Ferguson's angle(FA), and sagittal vertical axis(SVA) were measured on the lateral entire spine X-ray cuts, and the relationships between these values and patient gender, age, chief complaint, and duration of symptoms were assessed. Results : No significant difference was found in relationships between gender and measured values. SVA showed statistically significant correlation between age, but CLA, LLA, and FA was not. There was a significant difference in SVA between patients with only cervical pain and those with both cervical pain and low back pain. Patients with a duration of symptoms longer than 6 months showed a statistically significant difference in SVA with those who had shorter symptoms. Correlation analysis between measured values was statistically significant only between LLA and FA. Conclusions : Evaluation and treatment of sagittal imbalance should be considered in patients presenting with cervical pain if symptoms have persisted for over 6 months or have accompanying low back pain.

Purpose: Intravascular papillary endothelial hyperplasia (IPEH), also known as Masson's pseudoangiosarcoma, is a rare disease which is now considered as a reactive process of the endothelium rather than a benign neoplasm. It can occur in any blood vessels in the body but more common in the head and neck region as a solitary, often tender, bluish or reddish nodule. IPEH is characterized by the development of endothelial-lined papillary projections in a vascular lumen, usually associated with thrombotic material, the endothelial cells in the papillary structures showing only slight atypia and occasional mitotic Figures, the absence of tissue necrosis. Methods: 8 patients with IPEH were enrolled in the study from 2002 to 2007. All 8 lesions were surgically excised for histopathologic diagnosis. Results: 4 patients were female. The duration of the lesions ranged from 3 months to 15 years. The tumors were first noted between the ages of 20 and 72 years. 4 patients had lesions on the head; 2 on the toe; 1 on the back; and 1 on the finger, respectively. All lesions were solitary, ranged in size from 2 mm to 27 mm. There were no recurrences. Conclusion: The clinical appearance of IPEH is not specific, presented as a primary neoplasm, and the diagnosis can be established by microscopic examination. Complete surgical excision is the best choice of therapy for patients with IPEH, and is both diagnostic and curative. Awareness of this lesion will prevent incorrect diagnosis and overly aggressive treatment.

본 연구에서는 2종류의 피라미드형 패조류용 인공어초의 안정성 평가를 위해 Froude 상사법칙을 적용한 고정상 및 이동상 수리모형실험을 수행하였으며, 현장 설계외력(파랑, 흐름 등) 조건에 따라 이론적/실험적 검토를 하였다. 실험 결과는 파랑-흐름 공존장에서 어초의 안정성에 영향을 미치는 무차원 영향인자(설계파라메타)인 쇄파상사지수, 수립자속도, 파압 등을 사용하여 상호관련성을 검토하였다. 그 실험결과, 어초의 활동을 일으키는 한계조건은 고정상 실험에서는 쇄파상사지수에 따라서 무차원 최대수립자속도가 약 0.4 이상일 때, 이동상 실험에서는 무차원 파압에 따라서 상대수심이 약 0.11 이하일 때 나타났다. 또한 상대수심에 따른 수평 및 연직 파압은 상대수심이 증감함에 따라서 선형적으로 감소하는 경향을 나타내었다.

This study conducted hydraulic testing to assess the stability of two types of pyramid-shaped artificial reefs (ARs) constructed to promote the growth of shellfish and seaweed. Previous theoretical and hydraulic experimental studies have clearly demonstrated Froude similitude. The results of this study revealed that some dimensionless design parameters affected the stability of both types of artificial reefs under various wave and current field conditions (e.g., surf similarity parameters, water particle velocity, wave pressure). In the fixed bed condition, the dimensionless water particle velocity based on the surf similarity parameter was large (about 0.4), and in the moveable bed condition, the relative water depth based on the dimensionless wave pressure was low (about 0.11). In addition, horizontal wave pressure and uplift pressure varied by relative water depth, demonstrating the tendency for wave pressure to decrease linearly with increased relative depth. These findings indicate that the development of more stable design technology forartificial reefs should be based on long-term data and additional study of sliding due to wave action. The findings also highlight the importance of hydraulic experiments in solving problems that have emerged in the design and construction of artificial reefs.

스피어 복호 알고리즘 (sphere decoding algorithm)은 다중 입출력 (MIMO) 통신 시스템에서 사용되는 복호기중 최대 우도 복호기 (Maximum Likelihood Detector)와 비슷한 BER(bit error rate)성능을 가지고 복잡도를 줄일수 있어서 최근 많이 연구되어 왔다. 이때 공간 다중화와 채널 부호의 연접시스템에서 연판정 정보(Soft output information) 를 스피어 복호 알고리즘을 통해 생성하기 위한 방법으로 리스트 스피어 복호 알고리즘 (List Sphere Decoding)이 알려져있다. 기존 리스트 스피어 디코딩 알고리즘은 리스트를 반지름을 업데이트 하지 않으므로 탐색시 복잡도가 매우 높다는것이 문제가 되므로, 차원별로 최적해의 가능성이 높은 격자 주변으로 검색을 제한하여 복잡도를 줄이는 알고리즘을 제안하고 성능과 복잡도를 실험한다.

현대사회에서 점차 경량콘크리트의 활용도에 대한 관심이 높아지고 있으나 이에 관한 연구실적은 아직까지 미비하다. 경량콘크리트는 그 특성상 가벼운 자중과 높은 에너지 흡수성을 가지고 있다는 점에서 방호벽에 적용 가능한 재료로 볼 수 있다. 이에 본 연구에서는 이러한 점을 고려하여 경량 방호벽에 대한 컴퓨터 시뮬레이션을 통한 경량콘크리트 방호벽의 거동해석을 수행하였으며, 이를 위해 미세역학기반 경량콘크리트 모델을 상용 유한요소 프로그램인 ABAQUS에 적용하여 경량콘크리트 압축공시체에 관한 해석을 선 수행하였다. 이를 통해 도출된 손상변수를 통하여 실제 방호벽에 대한 정적 하중 시뮬레이션을 수행하였다.

본 연구에서는 자연하안 조성을 위한 공법 설계시 공법의 적용 위치, 규모, 제원 등을 선정하기 위한 수문학적 정보 및 하천의 수문학적 특성에 적합한 식생을 선정하기 위한 수심, 침수기간 정보를 제공하기 위한 기법을 제시하였다. 이를 위해 장기 유출모형인 SWAT 모형을 적용하였으며, 자연하안 조성 공법 중 하나인 방틀이 시험 적용된 평창강을 대상으로 수문학적 특성을 분석하기 위한 유황 분석을 실시하였다. 평창강의 상안미 수위관측소 상류부에 위치한 방틀 시험지점의 유황을 분석하기 위해 상안미 수위관측소 상류유역을 대상유역으로 하여 상안미 수위관측소의 관측유량과 비교를 통해 신뢰성 있는 검보정을 마친 모형을 이용, 1989년부터 2008년까지 20년간의 유출분석을 실시하였다. 모의된 20년간의 일유출자료를 토대로 방틀 시공 단면의 유황곡선을 도시하여 유량특성을 분석하였으며, 유량을 수심으로 환산하여 대상 단면의 침수기간별 수심분포를 산정하였다. 또한 대상 단면의 하안을 침수기간별로 구분하여 하안의 높이에 따라 적정한 식생의 종류를 선정할 수 있는 자료를 생성하였다. 이와 같은 정보의 제공은 공법 설계에 필수적으로서 본 해석기술의 주요한 성과 및 활용성이라고 판단된다.

목적: 슬관절 초음파가 활액 양의 측정에서 신체 검사 및 단순 방사선 검사 소견과 비교하여 얼마나 유용한가를 알아 보고자 하였다. 대상 및 방법: 슬관절의 활액 증가가 의심되는 60예의 슬관절을 대상으로 하였다. 평균 나이는 61.3세, 여자 38명, 남자 22명 이였고, 비만하지 않은 사람이 24명, 비만한 사람이 36명 이였다. 신체 검사는 stroke test와 슬개골 부구 검사를 시행하였고, 방사선 소견은 측면 상에서 활액 양을 관찰하여 3단계로 분류하였으며, 초음파로 이를 확인하여 비교 분석하였다. 결과: stroke test는 39예에서 양성, 슬개골 부구 검사는 20예에서 양성을 보였고, 방사선 측면 검사는 1단계 47예, 2단계 7예, 3단계 3예로 관찰되었다. 초음파 검사는 평균 $7.67{\pm}2.90mm$의 활액 양이 관찰되었다. stroke test와 슬개골 부구 검사, 측면 방사선 검사 모두 초음파 검사와 양의 상관관계에 있었다(r=.405, .259, .714). 성별은 신체 검사에서는 상관관계의 큰 차이를 보이고 있지 않았고 측면 방사선 검사에서는 여성에서 강한 상관관계를 보였다(r=.789). 비만한 사람보다 비만하지 않은 사람이 세 검사 모두에서 더 강한 상관관계를 보였다. 신체 검사는 비만하지 않은 사람에서는 비교적 유용하였으나 비만한 사람에서는 부정확하였으며, 방사선 검사 상에서도 활액 정도 파악이 어려웠으나 초음파 상으로는 활액의 두께를 동적으로 측정하여 과학적 데이터를 얻을 수 있었다. 결론: 슬관절 활액 양의 측정에서는 초음파가 신체 검사나 방사선 소견에 비해 객관적 데이터를 얻을 수 있어 유용하였다.

Purpose: The goal of this study is to find out how useful ultrasonography is in measuring amount of effusion within the knee joint in comparison with physical examination and simple radiography. Materials and Methods: We evaluated total 60 cases which were suspicious for joint effusion. Average age was 61.3 years. The group was consisted of 22 males and 38 females, and 24 obese people and 36 non-obese people. Stroke test and patella floating test were done as physical examination. Amount of joint effusion was classified into 3 groups in simple lateral radiographic view and ultrasonography was used for recheck-up. Results: 39 cases were found positive in stroke test, and patella floating was shown in 20 cases. In simple lateral radiographic view, 47 cases of grade I, 7 cases of grade II and 3 cases of grade III were checked. Average $7.67{\pm}2.90mm$ amount of effusion was checked by ultrasonography. Amount of fluid in stroke test, patella floating test and simple lateral radiographic view showed close correlation with ultrasonography. Gender did not seem to affect physical examination, but strong correlation was found in female in simple radiography. Obese group showed closer relationship with all 3 exams compared with non-obese group. Physical examination was relatively effective with nonobese group, but not with obese group. And it was not easy to measure the amount of fluid with simple radiographic view, but we could obtain objective data from ultrasonography by measuring the amount of effusion dynamically. Conclusion: We concluded that more objective data was obtained with ultrasonography in comparison with physical examinations and simple radiography in the aspect of measuring amount of joint fluid.

IT service is increasing becoming a critical resource firms have to utilize effectively and efficiently. As the importance of IT service increases, the knowledge sharing between IT service people and users becomes more and more important. In this study, the IT service quality is posited as a critical independent construct that influences knowledge sharing attitude of users which in turn change the knowledge sharing intention. Service satisfaction is placed as a mediator between the quality and attitude to compare direct and indirect effect in the model. Results show that (1) IT service quality influences the knowledge sharing attitude of users directly, and indirectly through service satisfaction, (2) at the same time, however, the direct path from quality to attitude is found to be stronger than the indirect path through satisfaction, and (3) interestingly, satisfaction seems to have no direct effect on intention, but only through the attitude change as can be inferred from the theory of reasoned action. Outcome of this study implies the importance of IT service quality in improving the knowledge sharing activities between users and developers, and interestingly the aim of quality would not be targeted on satisfaction but on attitudinal changes.

이 논문에서는 교량의 급속시공을 위하여 분절하여 기 제작된 합성기둥을 현장에서 연결하여 완성하는 조립식 합성교각의 내진거동을 조사하였다. 이를 위해 서로 다른 연결 상세를 갖는 3개의 조립식 합성교각을 대상으로 정적반복가력실험을 수행하였다. 실험결과, 조립식 합성교각에 소성힌지가 발생하여도 현장연결부는 탄성적으로 거동하였고 연결부의 상대변위도 발생하지 않았다. 또한 조립식 합성교각의 전반적인 내진성능도 일반적인 내진상세를 가진 콘크리트교각에 비해서 우수한 것으로 나타났다.

This paper investigates the seismic behavior of a prefabricated composite column which is made by onsite connection of precast composite column segments to accelerate bridge construction. Quasi-static cyclic loading tests were performed on three prefabricated composite columns with different connection details to find their seismic capacity. Test results show that the onsite connections remains in elastic range and no slip is observed as designed in spite of plastic hinge formation at the column. The test results also indicate that the prefabricated composite column has better overall seismic capacity compared to a conventional reinforced concrete column with seismic details.

Purpose: Supernumerary nipple or polythelia is one of the developmental anomalies occurring at the embryonic stage and this anomaly usually arises from the milk line. While this atypical feature is determined during early developmental stage, it may not come out obviously or become troublesome until puberty or lactation. Moreover, sometimes it is confused with a pigmented nevus. Methods: Case 1, a 18-year-old woman with intramammary supernumerary breast consisted of another nipple with middle sized areola on the right lower breast was admitted for a $2.8{\times}3.1\;cm$-sized mass on the right breast which was starting appeared 1 year earlier. The preliminary cytological examination of the material obtained by needle aspiration biopsy from the mass was revealed by fibroadenoma with no malignant change. The patient had the surgical excision of the mass and accessory breast. Case 2, a 16 year-old woman admitted for intra-areolar polythelia of the left breast, even she doesn't have any family history of polythelia. Since she wanted surgical correction of her atypical nipple for aesthetic and psychological reasons, we reconstructed the areola using transposition flaps in an S-plasty design. Results: Case 1, the excised supernumerary nipple showed following histological features. In the superficial layer, an acanthotic and hyperpigmented epithelium with elongated rete ridges was found. In the dermis, there were follicles with hairs surrounded by hypertrophic sebaceous glands. In the deepest portion, abundant secretory glomerules and excretory ducts of apocrine gland type were observed. Case 2, follow-up visits 3 months after the procedure showed a satisfactory result with good shape and projection of the nipple. Conclusion: We report two cases of aberrant mammary tissue who underwent surgical correction, including complete breast (with nipple, areola, and glandular tissue) and intra-areolar polythelia according to the Kajava's classification, and the results were satisfactory.

NAND Multi-level cell Flash memory는 한 셀에 여러 bit의 정보를 저장하는 방법으로, 용량 집적도를 더욱 높일수 있는 기술로 각광 받고 있다. 하지만 한 셀당 레벨 수를 올릴 경우, 셀간 간섭 등 여러 물리적 이유들로 인해 오류가 발생하며, 이 주된 오류 방향은 unidirectional 함이 알려져 있다. 기존에는 오류 정정 부호(ECC)등을 이용하여 이를 해결하려 했지만, 우리는 셀간 간섭으로 인한 오류에 포커스를 맞추어, 이 영향을 예측하고 줄여서 오류를 보정하는 새로운 알고리즘들을 제안한다. 이 알고리즘은 기존 오류정정부호 기법들과 별도의 단계로 동시에 적용할 수 있기에 에러 정정능력 향상에 효과적이다. 제안된 알고리즘들을 시뮬레이션을 통하여 성능을 비교하고 효율적인 알고리즘이 무엇인지 알아본다.

NAND multilevel cell (MLC) flash memory is widely issued because it can increase the capability of storage by storing two or more bits to a single cell. However if a number of levels in a cell increases, some physical features like cell to cell interference result cell voltage shift and it is known that a VT shift is unidirectional. To reduce errors by the effects, we can consider error correcting codes(ECC) or signal processing methods. We focus signal processing methods for the cell to cell interference voltage shift effects and propose the algorithms which reduce the effects of the voltage shift by estimating it and making level read voltages be adaptive. These new algorithms can be applied with ECC at the same time, therefore these algorithms are efficient for MLC error correcting ability. We show the bit error rate simulation results of the algorithms and compare the performance of the algorithms.

본 논문에서는 반도체 생산 공정 중 클리닝 공정 설비에서, 웨이퍼의 장착 위치를 인식하는 영상 인식 시스템을 제안한다. 제안한 시스템은 웨이퍼의 위치 이탈에 따른 위치오차 발생 시 이를 클리닝 설비에 전달하여, 웨이퍼 클리닝 장비의 파손을 방지하여 시스템의 신뢰성과 경제성을 높이기 위한 것이다. 시스템의 주요 알고리즘은 카메라에 획득된 영상과 실제 웨이퍼간의 캘리브레이션 방법, 적외선 조명 및 필터 설계, 최소자승법 기반의 원 생성알고리즘에 의한 중심위치 판별법이다. 제안한 시스템은 고 신뢰성과 고 정밀의 위치인식 알고리즘을 사용하여, 효율적으로 웨이퍼 인라인 공정에 설치함을 목표로 하며 실험결과 충분한 허용 기준 내에서 오차를 검출해내는 좋은 성능을 보여준다.

This paper presents a position error recognition system when the wafer is mounted in cleaning equipment among the wafer manufacturing processes. The proposed system is to enhance the performance in cost and reliability by preventing the wafer cleaning system from damaging by alerting it when it is put in correct position. The key algorithms are the calibration method between image acquired from camera and physical wafer, a infrared lighting and the design of the filter, and the extraction of wafer boundary and the position error recognition resulting from generation of circle based on least square method. The system is to install in-line process using high reliable and high accurate position recognition. The experimental results show that the performance is good in detecting errors within tolerance.