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Simulation of High Vacuum Characteristics by VacTran Simulator

첫 페이지 보기
  • 발행기관
    국제인공지능학회(구 한국인터넷방송통신학회) 바로가기
  • 간행물
    The International Journal of Advanced Smart Convergence 바로가기
  • 통권
    Volume 11 Number 4 (2022.12)바로가기
  • 페이지
    pp.88-95
  • 저자
    Hyung-Taek Kim, Hyeongwon Jeong
  • 언어
    영어(ENG)
  • URL
    https://www.earticle.net/Article/A423250

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원문정보

초록

영어
Vacuum simulation is associated with the prediction and calculation of how materials, pumps and systems will perform using mathematical equations. In this investigation, three different high vacuum systems were simulated and estimated with each vacuum characteristics by VacTran simulator. In each of modelled vacuum systems, selection of gas loads into vessel, combination of rough and high vacuum pumps and dimension of conductance elements were proposed as system variables. In pump station model, the pumping speed to pressures by the combination of root pump was analyzed under the variations of vessel volume. In this study, the effects of outgassing dependent on vessel materials was also simulated and aluminum vessel was estimated to optimum materials. It was obtained from the modelling with diffusion pump that the diameter, length of 50×250[􀝉􀝉] roughing line was characterized as optimum variables to reach the ultimate pressure of 10E- 7[torr]. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacTran simulator. Feasibility of VacTran as vacuum simulator was verified and applications of VacTran in high tech process expected to be increased.

목차

Abstract
1. INTRODUCTION
2. SIMULATIONS
2.1 VacTran (ver. 3.48) simulator
2.2 Simulation modeling
3. CONCLUSION
Acknowledgement
References

키워드

VacTran Vacuum Simulator Vacuum System Modelling Vacuum Characteristics Simulation

저자

  • Hyung-Taek Kim [ Professor, Department of Advanced Materials Engineering, Incheon National University ] Corresponding Author
  • Hyeongwon Jeong [ Graduate School, Department of Advanced Materials Engineering, Incheon National University, Incheon, Korea ]

참고문헌

자료제공 : 네이버학술정보

간행물 정보

발행기관

  • 발행기관명
    국제인공지능학회(구 한국인터넷방송통신학회) [The International Association for Artificial Intelligence]
  • 설립연도
    2000
  • 분야
    공학>전자/정보통신공학
  • 소개
    인터넷방송, 인터넷 TV , 방송 통신 네트워크 및 관련 분야에 대한 국내는 물론 국제적인 학술, 기술의 진흥발전에 공헌하고 지식 정보화 사회에 기여하고자 한다.

간행물

  • 간행물명
    The International Journal of Advanced Smart Convergence
  • 간기
    계간
  • pISSN
    2288-2847
  • eISSN
    2288-2855
  • 수록기간
    2012~2025
  • 십진분류
    KDC 326 DDC 380

이 권호 내 다른 논문 / The International Journal of Advanced Smart Convergence Volume 11 Number 4

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