Earticle

초록

영어

In this study, controlling pattern gap was induced by deformation of the stretchable substrate. The pre-fabricated pattern was made by depositing an Au(gold) on the Si substrate, and PDMS(Polydimethylsiloxane) was used for the stretchable substrate in consideration of surface energy, formability, and viscoelastic characteristics. For uniform deformation of PDMS, it is manufactured in the form of a tensile specimen using a molding method. An external force is applied to the deformable substrate in the uni-axial direction using a self-manufactured JIG, and the Au thin film pattern is transferred to the substrate under tensile state. After that, the external force is removed, and the PDMS specimen is recovered to its initial state. At this time, it can be seen that the pre-fabricated pattern gap is shortened from the initial size due to the viscoelastic properties of the PDMS. As a result, it was characterized to deformation rate of the pattern gap according to elongation rate of PDMS.

목차

ABSTRACT
1. 서론
2. 실험 방법
2.1 Au 박막 패턴 제작
2.2 신축성 기판
2.3 신축성 기판 변형
2.4 패턴 변형
3. 실험결과 및 고찰
3.1 연신율에 따른 패턴 간격 변화
3.2 패턴 간격에 따른 변화율
4. 결론
후기
References

키워드

저자

• 장희수 [ Hee Soo Jang | School of Mechanical Engineering, Chonnam University ]
• 이동원 [ Dong-Weon Lee | Member, School of Mechanical Engineering, Chonam University, Professor ] Corresponding Author
• 심재삼 [ Jaesam Sim | Member, Automotive Materials & Components R&D Group, Korea Institute of Industrail Technology, Senior Resrarcher ] Corresponding Author

참고문헌

발행기관

간행물

표지보기 관심저널 등록

• 간행물명

  한국기계항공기술학회지(구 한국기계기술학회지) [Journal of the Korean Society of Mechanical and Aviation Technology ]

• 간기

  격월간

• pISSN

  1229-604X

• eISSN

  2508-3805

• 수록기간

  1999~2026

• 등재여부

  KCI 등재

• 십진분류

  KDC 550 DDC 620