Earticle

초록

영어

We have investigated the electrical transport properties of polycrystalline tantalum nitride (TaNx) films. Various compositions of tantalum (nitride) thin films have been deposited on SiO2 substrates by reactive DC magnetron sputtering while changing the ratio of nitrogen partial pressure. The substrate temperature was maintained at 283 K during deposition. X-ray diffraction analyses indicated the presence of α-Ta and β-Ta phases in the Ta film deposited in pure argon atmosphere, while fcc-TaNx phases appeared in the sputtering gas mixture of argon and nitrogen. The N/Ta atomic ratio in the film increased ranging from 0.36 to 1.07 for nitrogen partial pressure from 7 to 20.7%. The superconducting transition temperatures of the TaNx thin films were measured to be greater than 3.86 K with a maximum of 5.34 K. The electrical resistivity of TaNx thin film was in the range of 177-577 μΩcm and increased with an increase in nitrogen content. The upper critical filed at zero temperature for a TaN0.87 thin film was estimated to exceed 11.3 T, while it showed the lowest Tc = 3.86 K among the measured superconducting TaNx thin films. We try to explain the behavior of the increase of the residual resistivity and the upper critical field for TaNx thin films with the nitrogen content by using the combined role of the intergrain Coulomb effect and disorder effect by grain boundaries.

목차

Abstract
1. INTRODUCTION
2. EXPERIMENTAL DETAILS
3. RESULTS AND DISCUSSION
4. CONCLUSION
ACKNOWLEDGMENT
REFERENCES

키워드

저자

• Tae Jong Hwang [ School of General Education, Yeungnam University, Gyeongsan, Korea ] Corresponding author
• Soon-Gil Jung [ Center for Quantum Materials and Superconductivity (CQMS), Sungkyunkwan University, Department of Physics, Sungkyunkwan University, Suwon 16419, Korea ]

참고문헌

발행기관

간행물

표지보기 관심저널 등록

• 간행물명

  한국초전도·저온논문지 (구 한국초전도저온공학회논문지) [Progress in Superconductivity and Cryogenics]

• 간기

  계간

• pISSN

  1229-3008

• eISSN

  2287-6251

• 수록기간

  1999~2026

• 등재여부

  KCI 등재,SCOPUS

• 십진분류

  KDC 427 DDC 537