Earticle

초록

영어

In this paper, a practical estimation method is developed for the lot travel distance in order to evaluate semiconductor unified fabrication layouts using the absorbing Markov chain. The lot travel distance is defined as the total distance that a lot travels from the first process to the last process; it can be used to investigate whether a fabrication layout design is reasonable. Furthermore, unified fabrication has not yet been introduced in the literature; it is a fabrication method that uses only one type of automated material handling system (AMHS). When designing semiconductor fabrication layouts, every aspect of all alternatives should be investigated meticulously. The widely known and accepted methods, such as sophisticated simulations and mathematical modeling with high accuracy, require an extensive time period to build the model. However, in the early stages of the layout design, simple and insightful methods are required in order to investigate the numerous alternatives during a short time period. This paper presents a simple estimation method for the travel distance of a lot during its lifetime in a fabrication.

목차

Ⅰ. 서론
 Ⅱ. 기존 문헌 연구
 Ⅲ. 연구 대상 소개 및 가정
 Ⅳ. 수리모형
 Ⅴ. 결론
 참고문헌
 Abstract

키워드

저자

• 서민석 [ Min-Seok Seo | 삼성전자 반도체 사업부 책임 ] 제1저자
• 임대은 [ Dae-Eun Lim | 백석대학교 경상학부 조교수 ] 교신저자

참고문헌

발행기관

간행물

표지보기 관심저널 등록

• 간행물명

  생산성연구: 국제융합학술지 [Productivity Research: An International Interdisciplinary Journal]

• 간기

  격월간

• pISSN

  1225-3553

• 수록기간

  1987~2025

• 등재여부

  KCI 등재

• 십진분류

  KDC 325 DDC 330