Earticle

초록

영어

The aim of this work is signal processing of Secondary Ions Mass Spectrometry (SIMS) profiles for improving the depth resolution beyond its physical and instrumental limits. Indeed, we propose a new iterative deconvolution algorithm based on Tikhonov-Miller regularization where a priori model of solution is included. The latter is a denoisy and pre-deconvoluted signal obtained by wavelets shrinkage algorithm. It is shown that this new algorithm gives best results without artifacts and oscillations related to noise. This leads to a significant improvement of the depth resolution and peaks’ maximums. The SIMS profiles are obtained by analysis of delta layers of boron in a silicon matrix using Cameca-Ims6f instrument at oblique incidence. In the light of the obtained results, the advantages and limitations of this new method as well as suggestions for future work are presented and discussed.

목차

Abstract
 1. Introduction
 2. Tikhonov-Miller regularization
 3. Discreet Wavelet Transform
  3.1. Background
  3.2. Denoising via Wavelet Shrinkage
 4. The Proposed Algorithm
 5. Experimental
 6. Results and Discussion
 6. Conclusion
 References

키워드

저자

• Nadia Dahraoui [ Electronics Department, Faculty of Engineer Sciences, University Hadj Lakhdar of Batna, Batna, Algeria ]
• M’Hamed Boulakroune [ Electronics and Communication Department, Faculty of New Technologies of Information and Communication, University Kasdi Merbah of Ouargla, Ouargla, Algeria ]
• Djamel Benatia [ Electronics Department, Faculty of Engineer Sciences, University Hadj Lakhdar of Batna, Batna, Algeria ]

참고문헌

발행기관

간행물

표지보기 관심저널 등록

• 간행물명

  International Journal of Signal Processing, Image Processing and Pattern Recognition

• 간기

  격월간

• pISSN

  2005-4254

• 수록기간

  2008~2016

• 십진분류

  KDC 505 DDC 605