Earticle

초록

영어

The rapid growth and rise in applications of nanotechnology demand investigation and control of matters at nanometer or subnanometer scale. The fundamental component of nanotechnology is the nanopositioning device, which can be used to scan or position the sample precisely at nanometer or subnanometer scale. Besides fine resolution, high precision positioning and long travel range, many applications of nanotechnology require fast positioning system. To achieve these requirements, design of high precision and high bandwidth nanopositioning device is needed. To achieve nanoscale precision over nanoscale, nanopositioning stage driven by stack piezoelectric actuator is widely used in applications such as atomic force microscope (AFM) and scanning tunneling microscope (STM). This paper presents open loop time and frequency response characteristics of piezoelectric actuator based nanopositioner. The transient response characteristics and stability margins of this device can be improved by using feedback control law. This paper shows that substantial improvement in operating speed and position precision has been achieved using a feedback controller. The presence of hysteresis is the significant challenge in the use of piezoelectric actuator for nanopositioning applications. A successfully designed control system must be able to maintain stability margins and performance level, even in the presence of uncertainties/ nonlinearities in system dynamics and/or in the working environment to a certain degree. To meet these requirements, this paper synthesizes robust and optimal H- infinity controllers for a system having hysteresis non-linearities. Simulation results using MATLAB are given to validate the proposed controller for nanopositioning device. Further, a comparative analysis of different types of proposed controllers is also described.

목차

Abstract
 1. Introduction
 2. System identification and open loop characteristics
 3. Controller Design and Implementation
 4. Controller implementation and simulation
 5. System Robustness
 6. Conclusion
 References

키워드

저자

• Sheilza Jain [ Electronics Engineering Department, YMCA University of Science and Technology ]
• Maneesha Garg [ Humanities and Applied Science Department, YMCA University of Science and Technology ]
• Akhilesh Swarup [ Electrical Engineering Department, National Institute of Technology ]

참고문헌

발행기관

간행물

표지보기 관심저널 등록

• 간행물명

  International Journal of Control and Automation

• 간기

  월간

• pISSN

  2005-4297

• 수록기간

  2008~2016

• 십진분류

  KDC 505 DDC 605