Earticle

초록

영어

In this review article, we focus on various co-evaporation technologies developed for the fabrication of high performance REBa2Cu3O7-δ (RE: Y and Rare earth elements, REBCO) superconducting films. Compared with other manufacturing technologies for REBCO films such as sputtering, pulsed laser deposition (PLD), metal-organic deposition (MOD), and metal organic chemical vapor deposition (MOCVD), the co-evaporation method has a strong advantage of higher deposition rate because metal sources can be used as precursor materials. After the first attempt to produce REBCO films by the co-evaporation method in 1987, various co-evaporation technologies for high performance REBCO films have been developed during last several decades. The key points of each co-evaporation technology are reviewed in this article, which enables us to have a good insight into a new high throughput process, called as a Reactive Co-Evaporation by Deposition and Reaction (RCE-DR).

목차

Abstract
 1. INTRODUCTION
 2. PROGRESS IN THE CO-EVAPORATION TECHNOLOGY FOR REBCO THIN FILM DEVICES
 3. PROGRESS IN THE CO-EVAPORATION TECHNOLOGY FOR REBCO COATED CONDUCTORS
 4. COMPARlSON OF THE RCE-DR PROCESS WITH OTHER PROCESSES DEVELOPED FOR LONG-LENGTH REBCO COATED CONDUCTORS
 5. SUMMARY
 REFERENCES

키워드

저자

• J.W. Lee [ Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University ]
• S.I. Yoo [ Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University ] Corresponding author

참고문헌

발행기관

간행물

표지보기 관심저널 등록

• 간행물명

  한국초전도·저온논문지 (구 한국초전도저온공학회논문지) [Progress in Superconductivity and Cryogenics]

• 간기

  계간

• pISSN

  1229-3008

• eISSN

  2287-6251

• 수록기간

  1999~2026

• 등재여부

  KCI 등재,SCOPUS

• 십진분류

  KDC 427 DDC 537