Earticle

초록

영어

In this work, the yttrium oxide(Y2O3) thin films as the buffer layer were prepared by the simple solution coating and reel-to-reel process on an unpolished metal tape substrate. The Y2O3 thin films were successfully synthesized by the hydrolysis of yttrium acetate. We have studied the improvement of surface roughness with the concentration of solution(0.1 M, 0.4 M, M) and the number of coatings. The planarization by solution coating process is simple in comparison with the existing polishing process, and it is eco-friendly, and has the benefits of low cost process. The thickness of Y2O3 films was increased with the Y2O3 concentration in the solution, and the surface became smoother with the number of coating cycles. Using this process, we have achieved 1.2 nm RMS roughness from a starting roughness of over 31 nm on 25 μm2 area.

목차

Abstract
 1. INTRODUCTION
 2. EXPERIMENTS
  2.1. Reagents and measurements
  2.2. Synthesis
  2.3 Tape Substrate Coating
 3. RESULTS AND DISCUSSION
 4. CONCLUSION
 REFERENCES

저자

• Boo Min Kang [ Korea Electrotechnology Research Institμte, Applied Chemical Engineering, Pukyong National University ]
• Rock Kil Ko [ Korea Electrotechnology Research Institμte, Physics, Pusan National University ]
• Dong Hyuk Kim [ Korea Electrotechnology Research Institμte, Biomedical Sciences & Eηgineering， .lαje University ]
• Dong Woo Ha [ Korea Electrotechnology Research Institμte ]
• Seong Soo Park [ Applied Chemical Engineering, Pukyong National University ] Corresponding author

참고문헌

발행기관

간행물

표지보기 관심저널 등록

• 간행물명

  한국초전도·저온논문지 (구 한국초전도저온공학회논문지) [Progress in Superconductivity and Cryogenics]

• 간기

  계간

• pISSN

  1229-3008

• eISSN

  2287-6251

• 수록기간

  1999~2026

• 등재여부

  KCI 등재,SCOPUS

• 십진분류

  KDC 427 DDC 537